The 74th JSAP Autumn Meeting,2013

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Poster presentation

13. Semiconductors A (Silicon) » 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

[18p-P11-1~5] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

Wed. Sep 18, 2013 1:30 PM - 3:30 PM P11 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[18p-P11-1] Bias Voltage Dependence of Sharp Resonance in MOS-type Device

○Kazuhide Abe1 (Toshiba R&D Center1)

Keywords:共振器,MOS型デバイス,音響波