c-axis parallel helical AlN film structure grown by ion beam assisted deposition

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

Thu. Sep 19, 2013 10:00 AM - 12:00 PM A12 (TC1 3F-316)

10:15 AM - 10:30 AM

^○(D)Masashi Suzuki¹, Takahiko Yanagitani¹ (Nagoya Inst. Tech.¹)

Keywords:c軸平行螺旋構造,イオンビームアシスト成膜法