The 74th JSAP Autumn Meeting,2013

Presentation information

Print

Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[19a-A12-1~8] 7.6 Ion beams

Thu. Sep 19, 2013 10:00 AM - 12:00 PM A12 (TC1 3F-316)

11:45 AM - 12:00 PM

[19a-A12-8] Depth analysis of organic device by SIMS using gas cluster ion beam.

○Shunichiro Nakagawa1, Toshio Seki1,2, Takaaki Aoki1,2, Jiro Matsuo1,2 (Kyoto Univ.1, JST-CREST2)

Keywords:SIMS,Cluster ion beam