The 74th JSAP Autumn Meeting,2013

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Oral presentation

16. Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[19a-A4-1~11] 16.3 Bulk, thin-film and other silicon-based solar cells

Thu. Sep 19, 2013 9:00 AM - 12:00 PM A4 (TC1 2F-216)

9:00 AM - 9:15 AM

△ [19a-A4-1] Aluminum Oxide Thin Film for Solar Cell Passivation deposited by non-Vacuum Mist CVD

○Takayuki Uchida1, Toshiyuki Kawahramura2, Kenji Shibayama1, Shizuo Fujita1, Takahiro Hiramatsu3, Hiroyuki Orita3 (Graduate School of Eng., Kyoto Univ.1, Inst. for Nanotechnology, Kochi Univ. of Tech.2, TMEIC3)

Keywords:パッシベーション膜,酸化アルミニウム,ミストCVD