The 74th JSAP Autumn Meeting,2013

Presentation information

Print

Oral presentation

13. Semiconductors A (Silicon) » 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

[19a-B4-1~12] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

Thu. Sep 19, 2013 9:00 AM - 12:15 PM B4 (TC2 1F-106)

12:00 PM - 12:15 PM

[19a-B4-12] Optomechanical properties of MEMS Fabry-Perot interferometric surface stress sensor

○Kazuhiro Takahashi1, Ryo Ozawa1, Makoto Ishida1, Kazuaki Sawada1 (Toyohashi University of Technology1)

Keywords:バイオセンサ,Fabry-Perot