The 74th JSAP Autumn Meeting,2013

Sessions

13. Semiconductors A (Silicon) » 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

Poster presentation

[18p-P11-1~5] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

Wed. Sep 18, 2013 1:30 PM - 3:30 PM P11 (Davis Memorial Auditorium)

△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation

1:30 PM - 3:30 PM

Daisuke Yamane1, Toshifumi Konishi2, Takaaki Matsushima2, Ken Kagaya1, Masafumi Tsukuda1, Hiroyuki Ito1, Noboru Ishihara1, Hiroshi Toshiyoshi3, Katsuyuki Machida1,2, Kazuya Masu1 (Tokyo Inst. of Tech.1, NTT Advanced Tech. Corp.2, The Univ. of Tokyo3)

1:30 PM - 3:30 PM

Ken Kagaya1, Toshifumi Konishi2, Daisuke Yamane1, Takaaki Matsushima2, Masafumi Tsukuda1, Hiroyuki Ito1, Noboru Ishihara1, Hiroshi Toshiyoshi3, Katsuyuki Machida1,2, Kazuya Masu1 (Tokyo Institute of Technology1, NTT Advanced Technology Corp.2, The University of Tokyo3)

Oral presentation

[19a-B4-1~12] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

Thu. Sep 19, 2013 9:00 AM - 12:15 PM B4 (TC2 1F-106)

△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation

Break (10:30 AM - 10:45 AM)

11:00 AM - 11:15 AM

Ryuhei Hayashi1, Hirokazu Nakazawa1, Makoto Ishida1, Kazuaki Sawada1, Hiromu Ishii1, Katsuyuki Machida2,3, Noboru Ishihara2, Kazuya Masu2, Changle Wang4, Kenichirou Iida4, Mitsumasa Saitou4, Shinichi Yoshida4 (Toyohashi Univ. of Technology1, Tokyo Institute of Technology2, NTT-AT3, Graduate School of Medical Sciences, Kyushu Univ4)