[19a-B4-1~12] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

[19a-B4-5] Heterogeneously Integrated Fluorescence Detection Devices －Integration of A Excitation Source－

^○Keiko Sumitomo¹, Sachiko Ito¹, Ryo Takigawa¹, Noriyuki Tsujimura¹, Hisayuki Kato¹, Takeshi Kobayashi¹, Ryutaro Maeda¹, Toshihiro Kamei¹ (AIST UMEMSME¹)

Keywords:ヘテロ集積化