In-plane Nano-electro-mechanical Resonators: Design, Fabrication and Measurement

Faezeh Arab Hassani

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

[19a-B4-1~12] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

Thu. Sep 19, 2013 9:00 AM - 12:15 PM B4 (TC2 1F-106)

10:15 AM - 10:30 AM

▼ [19a-B4-6] In-plane Nano-electro-mechanical Resonators: Design, Fabrication and Measurement

^○(P)Faezeh Arab Hassani¹, Cecilia Dupre², Eric Ollier², Sebastian T Bartsch³, Adrian Mihai Ionescu³, Yoshishige Tsuchiya⁴, Hiroshi Mizuta⁴ (JAIST¹, CEA-LETI², EPFL³, Univ. of Southampton⁴)

Keywords:Nano-electro-mechanical resonator,Junction-less field-effect-transistor detection,free-free NEM resonator

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