[19a-B4-1~12] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

[19a-B4-7] Photo-Patternable and Adhesive Polymer for Wafer-Scale Microfluidic Device Fabrication

^○Katsuhiko Hieda¹, Tom Miyazaki², Sara Peters², Paru Deshpande³, Liesbet Lagae³, John O'Callghan³, Josine Loo³, Chengxun Liu³, Bivragh Majeed³, Karolien Jans³ (JSR Corporation¹, JSRMicro N.V.², IMEC³)

Keywords:マイクロ流路,接着,リソグラフィー