[19a-B4-1~12] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

△ [19a-B4-4] Polarization selective uncooled infrared sensor by asymmetrical plasmonic metamaterial

^○Kyouhei Masuda¹, Yousuke Takagawa¹, Shinpei Ogawa², Masafumi Kimata¹ (Ritsumeikan Univ¹, Mitsubishi Electric Corp²)

Keywords:plasmon,MEMS