[19a-B4-1~12] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

[19a-B4-10] Improvement of displacement sensor output of self-sensitive piezoelectric MEMS micro cantilevers by tuning the PZT thin films

^○takeshi kobayashi¹, shoji oyama², natsumi makimoto¹, hiroshi funakubo³, ryutaro maeda¹ (AIST¹, Hirose electric Co.², Tokyo Inst. of Technology³)

Keywords:PZT,MEMS,静電気センサ