The 74th JSAP Autumn Meeting,2013

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

[19a-B4-1~12] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

Thu. Sep 19, 2013 9:00 AM - 12:15 PM B4 (TC2 1F-106)

11:15 AM - 11:30 AM

[19a-B4-9] Room-Temperature Micro-I/O interconnect of qVGA Array Using Ultrasonic Bonding of Compliant Bump

Keiichiro Iwanabe1, Takanori Shuto1, Tanemasa Asano1 (Kyushu Univ.1)

Keywords:Compliant Bump