[19a-B4-1~12] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

▲ [19a-B4-2] Size effect on the single crystal diamond NEMS resonators

^○Meiyong Liao¹, Masaya Toda², Liwen Sang¹, Masataka Imura¹, Shunichi Hishita¹, Shuji Tanaka², Yasuo Koide¹ (National Institute for Materials Science¹, Tohoku University²)

Keywords:ダイヤモンド,ナノマシン