[19a-B4-1~12] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

[19a-B4-1] [Young Scientist Oral Presentation Award Speech](15 min.) Fabrication of MEMS Mirror Using Thick-film PZT/PZT Bimorph Structure

^○Junichi Inoue¹, Kensuke Kanda^1,2, Takashi Saito², Takashi Fujita^1,2, Kazusuke Maenaka^1,2 (University of Hyogo¹, JST²)

Keywords:PZT,Bimorph,MEMS