[18p-P11-1~5] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

[18p-P11-3] A Study on Sensor Circuits for an Integrated CMOS-MEMS Accelerometer

^○Toshifumi Konishi¹, Daisuke Yamane², Takaaki Matsushima¹, Satoshi Maruyama³, Ken Kagaya², Hiroyuki Ito², Noboru Ishihara², Hiroshi Toshiyoshi³, Katsuyuki Machida^1,2, Kazuya Masu² (NTT-AT¹, Tokyo Tech.², Univ. of Tokyo³)

Keywords:CMOS-MEMS,センサ回路,加速度センサ