[18p-P11-1~5] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

△ [18p-P11-4] Evaluation of an Arrayed MEMS Accelerometer

^○Daisuke Yamane¹, Toshifumi Konishi², Takaaki Matsushima², Ken Kagaya¹, Masafumi Tsukuda¹, Hiroyuki Ito¹, Noboru Ishihara¹, Hiroshi Toshiyoshi³, Katsuyuki Machida^1,2, Kazuya Masu¹ (Tokyo Inst. of Tech.¹, NTT Advanced Tech. Corp.², The Univ. of Tokyo³)

Keywords:CMOS-MEMS,加速度センサ,アレイ