[18p-P11-1~5] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

△ [18p-P11-5] A Study on Energy Harvesting Devices(1)

^○Ken Kagaya¹, Toshifumi Konishi², Daisuke Yamane¹, Takaaki Matsushima², Masafumi Tsukuda¹, Hiroyuki Ito¹, Noboru Ishihara¹, Hiroshi Toshiyoshi³, Katsuyuki Machida^1,2, Kazuya Masu¹ (Tokyo Institute of Technology¹, NTT Advanced Technology Corp.², The University of Tokyo³)

Keywords:エネルギーハーベスティング,CMOS-MEMS,金