The 74th JSAP Autumn Meeting,2013

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Poster presentation

13. Semiconductors A (Silicon) » 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

[18p-P11-1~5] 13.8 Basics and applications of MEMS, NEMS: Integration of diverse functionalities

Wed. Sep 18, 2013 1:30 PM - 3:30 PM P11 (Davis Memorial Auditorium)

1:30 PM - 3:30 PM

[18p-P11-2] High voltage generation across vertical sidewalls of photocells for driving micromirror

Taichi Yamamoto1, Hironori Kubo1, Shinya Kumagai1, ○Minoru Sasaki1 (Toyota Tech. Inst.1)

Keywords:垂直壁,立体配線,太陽電池