[19a-B4-1~12] 13.8 MEMS, NEMSの基礎と応用：異種機能集積化

[19a-B4-7] Photo-Patternable and Adhesive Polymer for Wafer-Scale Microfluidic Device Fabrication

^○稗田克彦¹，Tom Miyazaki²，Sara Peters²，Paru Deshpande³，Liesbet Lagae³，John O’callghan³，Josine Loo³，Chengxun Liu³，Bivragh Majeed³，Karolien Jans³ (JSR¹，JSR Micro N.V.²，IMEC³)

キーワード：マイクロ流路,接着,リソグラフィー