Study of GaN Plasma Etching Processes by Quantum Chemical Molecular Dynamics Simulation

Presentation information

Oral presentation

15. Crystal Engineering » 15.4 III-V-group nitride crystals

Thu. Sep 19, 2013 9:00 AM - 12:00 PM B5 (TC2 2F-201)

9:00 AM - 9:15 AM

^○(M2)Kazuyuki Yanagiya¹, Hiroshi Ito¹, Takuya Kuwahara¹, Yuji Higuchi¹, Nobuki Ozawa¹, Momoji Kubo¹ (Tohoku Univ.¹)

Keywords:GaN,Etching