Time Evolution of Secondary Particles Emitted from a High Power Impulse Magnetron Sputtering Source

Keizo Tsukamoto

Presentation information

Oral presentation

08. Plasma Electronics » 8.2 Plasma measurements and diagnostics

[19a-C1-1~11] 8.2 Plasma measurements and diagnostics

Thu. Sep 19, 2013 9:00 AM - 12:00 PM C1 (TC3 1F-101)

9:15 AM - 9:30 AM

[19a-C1-2] Time Evolution of Secondary Particles Emitted from a High Power Impulse Magnetron Sputtering Source

^○Keizo Tsukamoto^1,2, Tetsuro Tamura¹, Kiichirou Koyasu¹, Keijiro Ohshimo¹, Hiroaki Yamamoto², Masahide Tona², Fuminori Misaizu¹ (Tohoku Univ.¹, Ayabo Corporation²)

Keywords:HIPIMS,TOF,Sputtering

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