[19a-C1-1~11] 8.2 Plasma measurements and diagnostics

Thu. Sep 19, 2013 9:00 AM - 12:00 PM C1 (TC3 1F-101)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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9:00 AM - 9:15 AM

▼ [19a-C1-1] Application of Curling Probe to Pulsed Plasma

^○Anil Pandey¹, Wataru Sakakibara², Hiroyuki Matsuoka², Keiji Nakamura¹, Hideo Sugai¹ (Chubu University¹, Dowa Thermotech²)

9:15 AM - 9:30 AM

[19a-C1-2] Time Evolution of Secondary Particles Emitted from a High Power Impulse Magnetron Sputtering Source

^○Keizo Tsukamoto^1,2, Tetsuro Tamura¹, Kiichirou Koyasu¹, Keijiro Ohshimo¹, Hiroaki Yamamoto², Masahide Tona², Fuminori Misaizu¹ (Tohoku Univ.¹, Ayabo Corporation²)

9:30 AM - 9:45 AM

△ [19a-C1-3] Characteristic Impedance Monitoring Method for Fault Detection in Plasma Production Line

^○Taisei Motomura¹, Yuji Kasashima¹, Osamu Fukuda¹, Fumihiko Uesugi¹, Hiroyuki Kurita², Naoya Kimura² (MSRC, AIST¹, ADVANTEST Corporation²)

9:45 AM - 10:00 AM

△ [19a-C1-4] Instantaneous generation of many flaked particles in plasma etching equipment

^○Yuji Kasashima¹, Natsuko Nabeoka¹, Taisei Motomura¹, Fumihiko Uesugi¹ (AIST¹)

10:00 AM - 10:15 AM

△ [19a-C1-5] Modulation frequency dependence of spatial profile of nanoparticle amount in reactive plasmas

^○(M2)Yasuhiko Morita¹, Shinya Iwashita², Daisuke Yamashita¹, Giichiro Uchida¹, Kunihiro Kamataki¹, Hyunwoong Seo¹, Naho Itagaki¹, Kazunori Koga¹, Masaharu Shiratani¹ (Kyushu Univ.¹, Ruhr Univ.²)

Break (10:15 AM - 10:30 AM)

10:30 AM - 10:45 AM

[19a-C1-6] [Young Scientist Oral Presentation Award Speech](15 min.) Influence of air engulfment on generation of activated species in AC power excited non-equilibrium atmospheric pressure Ar plasma jet

^○Keigo Takeda¹, Kenji Ishikawa¹, Hiromasa Tanaka¹, Hiroyuki Kano², Makoto Sekine¹, Masaru Hori¹ (Nagoya Univ.¹, NU-Eco Engineering²)

10:45 AM - 11:00 AM

[19a-C1-7] Plasma spectroscopy by using SHG of titanium sapphire laser.

^○Kenta Watanabe¹, Nobuo Nishimiya¹, Masao Suzuki¹ (Tokyo Polytechnic Unv.¹)

11:00 AM - 11:15 AM

[19a-C1-8] Laser detachment measurement of negative oxygen ions produced in small discharge tube by 13.56 MHz RF switching method

^○Akira Kiyohara¹, Haruhiko Himura¹, Akio Sanpei¹, Shigehumi Okada², Sadao Masamune¹ (kyoto Institute of Technology¹, Osaka University²)

11:15 AM - 11:30 AM

[19a-C1-9] Laser Thomson scattering measurement of microwave plasmas with gas pressures above atmospheric pressure

^○Shuntaro Soma¹, Yuji Ikeda², Koiti Sasaki¹ (Hokkaido Univ.¹, Imagineering, Inc.²)

11:30 AM - 11:45 AM

[19a-C1-10] Decomposition of Water-soluble Organic Solvent by the Atmospheric-pressure Non-equilibrium Discharge Plasma

^○Toshifumi Yuji¹, Daisuke Hirotani¹, Isamu Tsuda¹, Yuichi Kiyota¹, Hiroyuki Kinoshita², Kenichi Nakabayashi¹, Yoshimi Okamura¹, shinji Aoki³ (Ed.&Culture, Univ.Miyazaki¹, Eng., Univ.Miyazaki², ADTEC Plasma Co.Ltd.³)

11:45 AM - 12:00 PM

△ [19a-C1-11] Dependence of applied electric fields on interfacial water structure studied by sum frequency generation spectroscopy

^○Takahiro Kondo¹, Tsuyohito Ito¹ (Osaka Univ.¹)