[19a-C1-1~11] 8.2 Plasma measurements and diagnostics

△ [19a-C1-5] Modulation frequency dependence of spatial profile of nanoparticle amount in reactive plasmas

^○(M2)Yasuhiko Morita¹, Shinya Iwashita², Daisuke Yamashita¹, Giichiro Uchida¹, Kunihiro Kamataki¹, Hyunwoong Seo¹, Naho Itagaki¹, Kazunori Koga¹, Masaharu Shiratani¹ (Kyushu Univ.¹, Ruhr Univ.²)

Keywords:ナノ粒子