The 74th JSAP Autumn Meeting,2013

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Oral presentation

13. Semiconductors A (Silicon) » 13.4 Interconnection technology

[19a-C10-1~9] 13.4 Interconnection technology

Thu. Sep 19, 2013 9:30 AM - 12:00 PM C10 (TC3 2F-207)

9:30 AM - 9:45 AM

[19a-C10-1] Low-k Mesoporous Pure Silica Zeolite Synthesis with Centrifugation Process of Zeolite Precursor

○Tadashi Sato1, Shin-Ichiro Kuroki1, Yasuhisa Kayaba2, Takamaro Kikkawa1 (RNBS, Hiroshima Univ.1, Mitsui Chemicals, Inc.2)

Keywords:zeolite,遠心分離