[19a-C10-1~9] 13.4 Interconnection technology

[19a-C10-2] The acceleration mechanism and the observation of RF bias enhanced neutral beam

^○Yasuaki Sakakibara², Yoshiyuki Kikuchi^1,2, Seiji Samukawa¹ (Tohoku Univ.¹, Tokyo Electron²)

Keywords:中性粒子ビーム支援化学気相成長法,SiCOH系低誘電率絶縁膜,アルゴンプラズマ