The 74th JSAP Autumn Meeting,2013

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13. Semiconductors A (Silicon) » 13.4 Interconnection technology

[19a-C10-1~9] 13.4 Interconnection technology

Thu. Sep 19, 2013 9:30 AM - 12:00 PM C10 (TC3 2F-207)

10:15 AM - 10:30 AM

[19a-C10-4] Investigation on Crystal Orientation Dependence of Corrosion of Copper Wire by Atomic Force Microscopy

○Shoichiro Ogata1, Naritaka Kobayashi1, Chikako Takatoh2, Shohei Shima2, Akira Fukunaga2, Hitoshi Asakawa3, Takeshi Fukuma1,3,4 (Grad. school, Kanazawa Univ.1, Ebara Corp.2, Bio-AFM FRC., Kanazawa Univ.3, ACT-C/JST4)

Keywords:原子間力顕微鏡,腐食,結晶方位