[19a-C8-1~12] 13.6 Silicon devices / Integration technology

[19a-C8-6] Analysis of current-onset voltage fluctuation for FinFETs : Influence of work function variation of metal gates

^○Takashi Matsukawa¹, Yongxun Liu¹, Junichi Tsukada¹, Kazuhiko Endo¹, Hiromi Yamauchi¹, Yuki Ishikawa¹, Shinichi O'uchi¹, Wataru Mizubayashi¹, Hiroyuki Ota¹, Shinji Migita¹, Yukinori Morita¹, Meishoku Masahara¹ (AIST¹)

Keywords:FinFET,特性ばらつき,非晶質金属