Laser lift-off of epitaxial PZT thin films and fabrication of high efficiency piezoelectric vibration energy harvesters

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.1 Ferroelectric thin films

Thu. Sep 19, 2013 9:00 AM - 12:00 PM D1 (MK 1F-101)

9:45 AM - 10:00 AM

^○Eisaku Suwa¹, Yuichi Tsujiura¹, Fumiya Kurokawa¹, Isaku Kanno¹ (Kobe univ.¹)

Keywords:エナジーハーベスタ,レーザーリフトオフ,エピタキシャル