The 74th JSAP Autumn Meeting,2013

Presentation information

Oral presentation

06. Thin Films and Surfaces » 6.1 Ferroelectric thin films

[19a-D1-1~11] 6.1 Ferroelectric thin films

Thu. Sep 19, 2013 9:00 AM - 12:00 PM D1 (MK 1F-101)

10:00 AM - 10:15 AM

[19a-D1-5] Influence of voltage application on the vibration sensor with tetragonal PZT thin films

Yasuhiro Suzuki1,2, Natumi Makimoto2, Hiroshi Hunakubo3, Ryutaro Maeda2, Takeshi Kobayashi2 (Ibaraki Univ1, AIST2, Tokyo Tech3)

Keywords:PZT,振動センサ