[19a-P3-1~27] 6.3 Oxide-based electronics

[19a-P3-17] Compound oxide particulate thin film production evaluation and semiconductor gas sensor application by the liquid phase PLA method

^○HONGQUAN YANG¹, Yutaka Nagai¹, Hirosi Ono¹, Katumi Tanaka¹ (The Uni.of Electro-Communications,Japan¹)

Keywords:複合酸化物,微粒子,薄膜