[19a-P3-1~27] 6.3 Oxide-based electronics

△ [19a-P3-19] Phase control and characterization of cobalt oxide thin films grown by room-temperature Laser MBE

^○Akifumi Matsuda¹, Satoru Kaneko^1,2, Mamoru Yoshimoto¹ (Tokyo Tech¹, Kanagawa Ind. Tech. Cent.²)

Keywords:酸化コバルト,エピタキシー,レーザーMBE