The 74th JSAP Autumn Meeting,2013

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Poster presentation

13. Semiconductors A (Silicon) » 13.1 Basic properties and their evaluation

[19a-P4-1~2] 13.1 Basic properties and their evaluation

Thu. Sep 19, 2013 9:30 AM - 11:30 AM P4 (Davis Memorial Auditorium)

9:30 AM - 11:30 AM

[19a-P4-1] Practical STEM-EBIC technique for visualization of depletion layer on Si devices

○Hiroki Tanaka1, Takayuki Tshikawa1, Kazuhiro Hanada2, Akira Misato2, Mitsuhiro Tomita1 (Toshiba Corp., corporate R&D center.1, Toshiba S&S Co.2)

Keywords:EBIC,STEM,depletion