The 74th JSAP Autumn Meeting,2013

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Poster presentation

13. Semiconductors A (Silicon) » 13.5 Si process technology

[19a-P5-1~14] 13.5 Si process technology

Thu. Sep 19, 2013 9:30 AM - 11:30 AM P5 (Davis Memorial Auditorium)

9:30 AM - 11:30 AM

[19a-P5-11] Effect of n-type Impurities and Sulfur on Carrier Concentrations in Poly-crystalline Ge

○Masahiro Koike1, Yuuichi Kamimuta1, Yoshiki Kamata1, Etsuo Kurosawa1, Tsutomu Tezuka1 (GNC, AIST1)

Keywords:半導体,ゲルマニウム,poly-Ge