9:30 AM - 11:30 AM
○(BC)Ryohei Morita1, Yuki Yamaguti1, Mutsumi Kimura1, Tokiyoshi Matsuda1 (Ryukoku Univ1)
Poster presentation
13. Semiconductors A (Silicon) » 13.5 Si process technology
Thu. Sep 19, 2013 9:30 AM - 11:30 AM P5 (Davis Memorial Auditorium)
△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation
9:30 AM - 11:30 AM
○(BC)Ryohei Morita1, Yuki Yamaguti1, Mutsumi Kimura1, Tokiyoshi Matsuda1 (Ryukoku Univ1)
9:30 AM - 11:30 AM
○Kenji Shimada1, Tokiyosi Matsuda1, Mutsumi Kimura1 (Ryukoku Univ.1)
9:30 AM - 11:30 AM
○(M1)Tatsuya Meguro1, Akito Hara1 (Tohoku Gakuin Univ.1)
9:30 AM - 11:30 AM
○Shun Sasaki1, Akito Hara1 (Tohoku Gakuin Univ.1)
9:30 AM - 11:30 AM
○Naoya Kawamoto1, Kazuyuki Tadatomo1, Akira Heya2, Naoto Matsuo2 (Yamaguchi Univ.1, Univ. of Hyogo2)
9:30 AM - 11:30 AM
○Masayuki Yamano1, Shin-Ichiro Kuroki1, Tadashi Sato1, Nobuhiro Hata2, Koji Kotani3, Takamaro Kikkawa1 (RNBS1, AIST2, Tohoku Univ.3)
9:30 AM - 11:30 AM
○Shohei Hayashi1,2, Yuji Fujita1, Seiji Morisaki1, Takahiro Kamikura1, Shogo Yamamoto1, Seiichiro Higashi1 (Hiroshima Univ.1, JSPS Research Fellow DC2)
9:30 AM - 11:30 AM
○Yoshihiko Moriyama1,2, keiji Ikeda1, Shotaro Takeuchi2, Yuuichi Kamimuta1, Yoshiaki Nakamura2, Akira Sakai2, Koji Izunome3, Tsutomu Tezuka1 (GNC-AIST1, Osaka Univ.2, GlobalWafers Japan3)
9:30 AM - 11:30 AM
○Mitsuki Ito1, Ryutaro Suda1, Mamiko Yagi1, Akira Kojima1, Mentek Romain1, Jun-ichi Shirakashi1, Nobuyoshi Koshida1 (Graduate School of Eng., Tokyo Univ. of Agri. & Technol.1)
9:30 AM - 11:30 AM
○Heya Akira1, Kusakabe Fumito1, Maruyama Yuki1, Matsuo Naoto1, Kanda Kazuhiro2, Noguchi Takashi3 (Dept. Mat. Sci. Chem. Univ. of Hyogo1, LASTI Univ. of Hyogo2, The Univ. of Ryukyu3)
9:30 AM - 11:30 AM
○Masahiro Koike1, Yuuichi Kamimuta1, Yoshiki Kamata1, Etsuo Kurosawa1, Tsutomu Tezuka1 (GNC, AIST1)
9:30 AM - 11:30 AM
○(D)Minsoo Kim1, Yuki Wakabayashi1, Ryosho Nakane1, Masafumi Yokoyama1, Mitsuru Takenaka1, Shinichi Takagi1 (The Univ. of Tokyo1)
9:30 AM - 11:30 AM
○Yoshihiko Moriyama1,2, Yuuichi Kamimuta1, Yoshiki Kamata1, Keiji Ikeda1, Shotaro Takeuchi2, Yoshiaki Nakamura2, Akira Sakai2, Tsutomu Tezuka1 (GNC-AIST1, Osaka Univ.2)
9:30 AM - 11:30 AM
○Tsuguhiro Tago1,2, Kunio Ichino2, Mayumi Kimura1, kenji Isami1 (HAYASHI PURE CHEMICAL IND.,LTD.1, Graduate School of Engineering, Tottori University2)