The 74th JSAP Autumn Meeting,2013

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Poster presentation

13. Semiconductors A (Silicon) » 13.5 Si process technology

[19a-P5-1~14] 13.5 Si process technology

Thu. Sep 19, 2013 9:30 AM - 11:30 AM P5 (Davis Memorial Auditorium)

9:30 AM - 11:30 AM

[19a-P5-14] Development of Al Damage-less Silicon anisotropic Etchant

○Tsuguhiro Tago1,2, Kunio Ichino2, Mayumi Kimura1, kenji Isami1 (HAYASHI PURE CHEMICAL IND.,LTD.1, Graduate School of Engineering, Tottori University2)

Keywords:MEMS,Ｓｉ,wet etching