9:30 AM - 11:30 AM
[19a-P5-5] Relationship between Crystal Growth of Polycrystalline Si Film and Crystal Defect Density by Visible Laser Irradiation
Keywords:多結晶シリコン
Poster presentation
13. Semiconductors A (Silicon) » 13.5 Si process technology
Thu. Sep 19, 2013 9:30 AM - 11:30 AM P5 (Davis Memorial Auditorium)
9:30 AM - 11:30 AM
Keywords:多結晶シリコン