The 74th JSAP Autumn Meeting,2013

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Poster presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.3 Electron devices and Process technology

[19a-P7-1~14] 14.3 Electron devices and Process technology

Thu. Sep 19, 2013 9:30 AM - 11:30 AM P7 (Davis Memorial Auditorium)

9:30 AM - 11:30 AM

[19a-P7-6] MISFETs with Ion Implanted Isolation Layers on p-GaN Substrate

○(M1)hayao kasai1, hiroki ogawa1, tohru nakamura1 (Hosei Univ.1)

Keywords:GaN,素子分離,イオン注入