[19a-P9-1~10] 15.6 IV-group-based compounds

▲ [19a-P9-2] Hall-effect measurement on the electrical properties of heavily Al-doped 4H-SiC thick epilayer

^○Shiyang Ji¹, Kazutoshi Kojima¹, Yuuki Ishida¹, Shingo Saito¹, Tomohisa Kato¹, Sadafumi Yoshida¹, Hidekazu Tsuchida², Hajime Okumura¹ (Natl. Inst of Adv. Ind. Sci. and Tech. (AIST)¹, Central Res. Inst. of Electric Power Indust. (CRIEPI)²)

Keywords:pカタタンカケイソ,デンキトクセイ,アツマク