The 74th JSAP Autumn Meeting,2013

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Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[19p-A12-1~13] 7.6 Ion beams

Thu. Sep 19, 2013 1:30 PM - 5:00 PM A12 (TC1 3F-316)

4:00 PM - 4:15 PM

[19p-A12-10] Irradiation Effects of Acetone Cluster Ion Beam on Silicon Surface

○Yuuki Kakumoto1, Hiromichi Ryuto1, Mitsuaki Takeuchi1, Gikan Takaoka1 (Kyoto Univ.1)

Keywords:イオンビーム