The 74th JSAP Autumn Meeting,2013

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Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[19p-A12-1~13] 7.6 Ion beams

Thu. Sep 19, 2013 1:30 PM - 5:00 PM A12 (TC1 3F-316)

3:45 PM - 4:00 PM

[19p-A12-9] Generation of probe for high spatial resolution cluster SIMS

○Sota Torii1, Jiro Matsuo1, Toshio Seki1, Takaaki Aoki1 (Kyoto Univ.1)

Keywords:クラスターイオンビーム