[19p-A12-1~13] 7.6 Ion beams

[19p-A12-7] Surface smoothing effects of carbon over coat on media with GCIB and its flying characteristics of slider

^○Asahi Kimura¹, Jun Tomita², Noriaki Toyoda¹, Hiroshi Tani², Isao Yamada¹ (Univ of Hyogo¹, Kansai Univ²)

Keywords:クラスター,磁気ヘッド,平坦化