The 74th JSAP Autumn Meeting,2013

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Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[19p-A12-1~13] 7.6 Ion beams

Thu. Sep 19, 2013 1:30 PM - 5:00 PM A12 (TC1 3F-316)

3:30 PM - 3:45 PM

[19p-A12-8] Si Etching with ClF3 Neutral Cluster Beam from Multi-nozzle

○Toshio Seki1, Yoshino Yu2, Takehiko Senoo2, Kunihiko Koike2, Takaaki Aoki1, Jiro Matsuo1 (Kyoto Univ.1, Iwatani Corp.2)

Keywords:クラスター