Fabrication of nanoimprint replica mold by room temperature nanoimprinting using PDMS contained HSQ

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

Thu. Sep 19, 2013 1:30 PM - 3:30 PM A13 (TC1 3F-323)

1:45 PM - 2:00 PM

^○(B)Norihiro Sugano¹, Makoto Okada¹, Yuichi Haruyama¹, Shinji Matsui¹ (Univ. of Hyogo¹)

Keywords:レプリカモールド