[19p-A13-1~7] 7.4 Nanoimprint

[19p-A13-3] Evaluation of fluorine additive segregation state for ultra-thin-film resin

^○(M1)Takahiro Oyama^1,3, Makoto Okada^1,3, Shuso Iyoshi^1,3, Yuichi Haruyama^1,3, Hiroto Miyake², Tomoya Mizuta², Shinji Matsui^1,3 (Univ. of Hyogo¹, Daicel², JST-CREST³)

Keywords:偏析,フッ素