[19p-A13-1~7] 7.4 Nanoimprint

[19p-A13-4] Study on the effect of additives in repeated UV nanoimprint demolding Ⅱ

^○Shuso Iyoshi^1,2, Makoto Okada^1,2, Yuichi Haruyama^1,2, Shinji Matsui^1,2, Masaru Nakagawa^2,3, Hiroshi Hiroshima^2,4 (Univ. of Hyogo¹, JST-CREST², Tohoku Univ.³, AIST⁴)

Keywords:UVナノインプリント,フッ素系界面活性剤,モールド耐久性