The 74th JSAP Autumn Meeting,2013

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

[19p-A13-1~7] 7.4 Nanoimprint

Thu. Sep 19, 2013 1:30 PM - 3:30 PM A13 (TC1 3F-323)

2:45 PM - 3:00 PM

[19p-A13-5] Fabrication of chemical guide patterns by UVnanoimprinting for Directed Self-Assembly

hitomi wakaba1, makoto okada1, syuso iyoshi1, yuichi haruyama1, shinji mastui1 (University of Hyogo1)

Keywords:ガイドパターン,誘導自己組織化,ミクロ相分離