4:45 PM - 5:00 PM
△ [19p-B4-13] Effects of Ar plasma irradiation on SAB based Si/Si junctions
Keywords:SAB,表面活性化ボンディング,suraface acitivated bonding
Presentation information
Oral presentation
13. Semiconductors A (Silicon) » 13.5 Si process technology
[19p-B4-1~21] 13.5 Si process technology
Thu. Sep 19, 2013 1:30 PM - 7:00 PM B4 (TC2 1F-106)