[19p-B4-1~21] 13.5 Siプロセス技術

▲ [19p-B4-4] Comparison of crystalline quality of SPC Si films grown on YSZ layers with that on glass substrates in pulse laser annealing

^○Lien Mai，堀田将 (北陸先端大)

キーワード：silicon,laser,crystallization