The 74th JSAP Autumn Meeting,2013

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Oral presentation

15. Crystal Engineering » 15.4 III-V-group nitride crystals

[19p-B5-1~22] 15.4 III-V-group nitride crystals

Thu. Sep 19, 2013 1:00 PM - 7:15 PM B5 (TC2 2F-201)

4:30 PM - 4:45 PM

[19p-B5-13] Correlation between Dislocations in GaN Epitaxial Layer and Wafer Dicing Process

○Hideyuki Taguchi1,3, Amane Kitahara1, Shugo Miyake1, Akimitsu Nakaue1, Atsushi Suzuki2, Satoshi Kamiyama2, Yasufumi Fujiwara3 (KOBELCO RESEARCH INSTITUTE, INC.1, Meijo Univ.2, Osaka Univ.3)

Keywords:ＧａＮ,転位,ダイシング