[19p-B5-1~22] 15.4 III-V-group nitride crystals

△ [19p-B5-5] X-ray diffraction analysis of epitaxial thick AlN films grown on triangular-striped AlN/Sapphire templates

^○Takuji Arauchi¹, Shotaro Takeuchi¹, Kunihiko Nakamura¹, Khan Dhin¹, Yoshiaki Nakamura^1,2, Hideto Miyake³, Kazumasa Hiramatsu³, Akira Sakai¹ (Osaka.univ¹, PRESTO-JST², Mie.univ³)

Keywords:Ⅲ-Ⅴ族窒化物半導体,x線回折